作者: M. Kopecky´,
期刊: Journal of Applied Physics (AIP Available online 1995) 卷期: Volume 77, issue 6
页码: 2380-2387
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.358762
出版商: AIP
数据来源: AIP
摘要:
A new theory of nonspecular x‐ray scattering from layered systems with random rough interfaces based on the distorted‐wave Born approximation is presented. Calculations of the diffuse scattering from a single gold layer and two W/Si multilayer mirrors has been carried out. The theory explains the existence of maxima and minima in the angular distribution of diffusely scattered intensity resulting from standing‐wave‐enhanced scattering and other dynamical effects. The influence of the mutual correlation between individual interface profiles on x‐ray scattering is discussed. ©1995 American Institute of Physics.
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