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Diffuse scattering of x rays from nonideal layered structures

 

作者: M. Kopecky´,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 6  

页码: 2380-2387

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.358762

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new theory of nonspecular x‐ray scattering from layered systems with random rough interfaces based on the distorted‐wave Born approximation is presented. Calculations of the diffuse scattering from a single gold layer and two W/Si multilayer mirrors has been carried out. The theory explains the existence of maxima and minima in the angular distribution of diffusely scattered intensity resulting from standing‐wave‐enhanced scattering and other dynamical effects. The influence of the mutual correlation between individual interface profiles on x‐ray scattering is discussed. ©1995 American Institute of Physics.

 

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