Nucleation of diamond on silicon, SiAlON, and graphite substrates coated with ana‐C:H layer
作者:
J. J. Dubray,
C. G. Pantano,
M. Meloncelli,
E. Bertran,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 3012-3018
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577165
出版商: American Vacuum Society
关键词: NUCLEATION;DIAMONDS;CARBON;HYDROGENATION;FILM GROWTH;SILICON;GRAPHITE;OXYNITRIDES;SILICON COMPOUNDS;ALUMINIUM COMPOUNDS;POLISHING;SUBSTRATES;diamond
数据来源: AIP
摘要:
We investigated the influence of a hydrogenated disordered carbon (a‐C:H) layer on the nucleation of diamond. Substratesc‐Si〈100〉, SiAlON, and highly oriented pyrolytic graphite {0001} were used in this study. The substrate surfaces were characterized with Auger electron spectroscopy (AES) while diamond growth was followed with Raman spectroscopy and scanning electron microscopy (SEM). It was found that on silicon and SiAlON substrates the presence of thea‐C:H layer enabled diamond to grow readily without any polishing treatment. Moreover, more continuous diamond films could be grown when the substrate was polished with diamond powder prior to the deposition of thea‐C:H layer. This important result suggests that the nucleation of diamond occurs readily on disordered carbon surfaces, and that the formation of this type of layer is indeed one step in the diamond nucleation mechanism. Altogether, the data refute the argument that silicon defects play a direct role in the nucleation process. Auger spectra revealed that for short deposition times and untreated silicon surfaces, the deposited layer corresponds to an amorphous carbon layer. In these cases, the subsequent diamond nucleation was found to be limited. However, when the diamond nucleation density was found to be high; i.e., after lengthy deposits ofa‐C:H or after diamond polishing, the Auger spectra suggested diamondlike carbon layers.
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