首页   按字顺浏览 期刊浏览 卷期浏览 Highly photosensitive magnetron-sputtered amorphous SiC:H doped with Al
Highly photosensitive magnetron-sputtered amorphous SiC:H doped with Al

 

作者: N. Saito,   Y. Tomioka,   T. Yamaguchi,   K. Kawamura,  

 

期刊: Philosophical Magazine Letters  (Taylor Available online 1989)
卷期: Volume 59, issue 1  

页码: 43-45

 

ISSN:0950-0839

 

年代: 1989

 

DOI:10.1080/09500838908214775

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Aluminium has been introduced into a-Sic: H by co-sputtering of silicon-aluminium in a gas mixture of methane-argon and its effect on the optical, electrical and opto-electronic properties of the films investigated. In the range of fractional aluminium content z up 10−2, the photoconductivity was maintained without a significant change in the optical band gap. A high value of photosensitivity (> 106) was obtained in the range of z between 10−4and 10−3. On increasing z above 10−2, the photoconductivity is quenched, being accompanied by a decrease in the optical band gap as well as by an increase in the dark d.c. conductivity.

 

点击下载:  PDF (156KB)



返 回