Epitaxial thin films of YBaCuO have been prepared with (1) theaaxis perpendicular to (100) SrTiO3; (2) thecaxis perpendicular to (100) SrTiO3; and (3) the [110] axis perpendicular to (110) SrTiO3. Films were fabricated using a multilayer deposition technique involving three electron guns containing Y, BaF2, and Cu under a pressure of 5×10−5Torr of O2. As deposited films, which contained polycrystalline and amorphous regions, were later annealed in a furnace under a flowing O2‐H2O atmosphere. X‐ray diffraction patterns as well as scanning electron microscopy and high‐resolution electron microscopy images confirm that the films are highly oriented, essentially epitaxial. Thea‐axis oriented film exhibits zero resistance at 90 K and a critical current density of 2.9×106A/cm2at 4.2 K while thec‐axis oriented film exhibits aTcof 88 K and aJcof 0.9×107A/cm2at 4.2K; theJcvalues were determined magnetically. The [110]‐orientation film shows the sharpest transition with a transition width of 1 K and zero resistance at 85 K.