A spin cast film of polyetherimide (Ultem®1000, GE Plastics) was analyzed by XPS using monochromatic AlKαexcitation. The measured atomic composition closely matched the expected stoichiometry of the polymer. Peak positions of the individual chemically shifted C 1s, O 1s, and N 1scomponents are reported. The results are in general agreement with other reported spectra of polyetherimide polymers: experimental, C 83.0%, O 12.9%, and N 4.1%; theoretical, C 82.2%, O 13.3%, and N 4.3%.