首页   按字顺浏览 期刊浏览 卷期浏览 Application of dynamic emittance matching to secondary ion mass spectrometry
Application of dynamic emittance matching to secondary ion mass spectrometry

 

作者: J. E. Campana,   J. J. DeCorpo,   J. R. Wyatt,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1981)
卷期: Volume 52, issue 10  

页码: 1517-1520

 

ISSN:0034-6748

 

年代: 1981

 

DOI:10.1063/1.1136486

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The implementation of the dynamic emittance matching (DEM) concept into our secondary ion mass spectrometer is described. The importance of this feature is presented in terms of increased ion transmission when operating at low primary ion beam fluxes, that is, the static secondary ion mass spectrometry (SIMS) or molecular SIMS mode. A discussion of the principle and the design of the DEM electronics in the system is given. Experimental comparisons are presented and discussed which contrast DEM and conventional results with respect to viewing area, ion transmission, and imaging capability.

 

点击下载:  PDF (314KB)



返 回