Dopant‐induced ablation of polymers by a 308 nm excimer laser
作者:
H. Hiraoka,
T. J. Chuang,
H. Masuhara,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 1
页码: 463-465
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.583976
出版商: American Vacuum Society
关键词: EXCIMER LASERS;ABLATION;POLYMERS;PHOTON COLLISIONS;ETCHING;STYRENE;HOLES;ULTRAVIOLET RADIATION;CRYSTAL DOPING;polymer
数据来源: AIP
摘要:
Photoablation of polymers by laser beams is a practical process for via holes preparation in polymeric insulators. Excimer laser photochemistry of polymers is actively considered for microlithography. The ablation rate is dependent on the absorption coefficient. By addition of a dopant, photoetching rates of polymers can be increased significantly. In the present study the photoetching rates of poly(dimethyl glutarimide) and chlorinated poly(methylstyrene) are studied with pyrene as a dopant with 308 nm of XeCl excimer laser.
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