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Linear capacitive displacement sensor with frequency readout

 

作者: Klaus Fritsch,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1987)
卷期: Volume 58, issue 5  

页码: 861-863

 

ISSN:0034-6748

 

年代: 1987

 

DOI:10.1063/1.1139646

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple, inherently linear technique for measuring changes in the separation of the mirrors of an optical cavity is reported. The capacitor made up of the reflective metallic coatings is part of a feedback loop which adjusts the frequency of an oscillator to be proportional to the mirror separation. A linearity of 0.2% full scale was achieved for separations up to 0.5 mm with a resolution of 10 nm.

 

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