Ranges of 10–30‐keV deuterons implanted into amorphous C, and polycrystalline Al, Ni, and Zr have been measured via the D(3He,&agr;)1H nuclear reaction. The finite depth resolution, which has been determined separately, was taken into account in the evaluation of the data. Monte Carlo computer calculations have been carried out for comparison with the experimental results. Generally, good qualitative agreement is observed.