SrTiO3thin film has been formed on Si(100) substrates with various single buffer layers such as SrO, CeO2, CaF2, CoSi2and a multibuffer layer, YSZ/Y2O3/YBa2Cu3O7by ArF excimer laser ablation. The relation of lattice orientation of buffer layers with SrTiO3layer has been elucidated. The orientation of SrTiO3film is influenced not only by lattice matching but by crystal structure and chemical bonding of the buffer layers. As well, the multibuffer layer more effectively forms preferentialc‐axis oriented SrTiO3film on Si(100), while CoSi2buffer is more effective for improving the dielectric constant of SrTiO3than other buffer layers. ©1995 American Institute of Physics.