Bimorph‐drivenx–y–ztranslation stage for scanned image microscopy
作者:
J. R. Matey,
R. S. Crandall,
B. Brycki,
G. A. D. Briggs,
期刊:
Review of Scientific Instruments
(AIP Available online 1987)
卷期:
Volume 58,
issue 4
页码: 567-570
ISSN:0034-6748
年代: 1987
DOI:10.1063/1.1139270
出版商: AIP
数据来源: AIP
摘要:
We have developed anx–y–zscanning stage for mechanically scanned microscopy. The stage is constructed of ‘‘double‐S’’ mode piezoelectric bimorphs. The prototype unit has a deflection sensitivity of 0.3 &mgr;m/V and a travel in each of the three axes of ±60 &mgr;m. The lowest mechanical resonances of the stage are at 190, 220, and 360 Hz, corresponding to thex,y, andzaxes of the stage, respectively. The noise level of the stage, when mounted on an isolation table, is ∼0.1 nm. The performance of the stage can be understood in terms of a simple lumped element model which can be used to optimize such stages for particular applications.
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