Microcomputer-aided interface-state analysis
作者:
P.J.Martin,
G.G.Roberts,
期刊:
IEE Proceedings I (Solid-State and Electron Devices)
(IET Available online 1980)
卷期:
Volume 127,
issue 3
页码: 133-136
年代: 1980
DOI:10.1049/ip-i-1.1980.0025
出版商: IEE
数据来源: IET
摘要:
A semiautomatic measurement system has been developed for evaluating the electronic structure of the interface between an insulator and a semiconductor. The associated microcomputer possesses advanced software which leads to simple operation particularly when used in a real-time mode. An attractive feature of the technique is that admittance data are evaluated in the voltage domain using a modified version of the Simonne method. The Si-SiO2junction has been used to demonstrate this novel approach although it is equally applicable to other semiconductor-insulator structures.
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