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Microcomputer-aided interface-state analysis

 

作者: P.J.Martin,   G.G.Roberts,  

 

期刊: IEE Proceedings I (Solid-State and Electron Devices)  (IET Available online 1980)
卷期: Volume 127, issue 3  

页码: 133-136

 

年代: 1980

 

DOI:10.1049/ip-i-1.1980.0025

 

出版商: IEE

 

数据来源: IET

 

摘要:

A semiautomatic measurement system has been developed for evaluating the electronic structure of the interface between an insulator and a semiconductor. The associated microcomputer possesses advanced software which leads to simple operation particularly when used in a real-time mode. An attractive feature of the technique is that admittance data are evaluated in the voltage domain using a modified version of the Simonne method. The Si-SiO2junction has been used to demonstrate this novel approach although it is equally applicable to other semiconductor-insulator structures.

 

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