Characterization of high purity GaAs films grown by molecular‐beam epitaxy from a solid As cracker
作者:
Robert Chow,
Rouel Fernandez,
David Atchley,
Kam Chan,
David Bliss,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1990)
卷期:
Volume 8,
issue 2
页码: 163-167
ISSN:0734-211X
年代: 1990
DOI:10.1116/1.584846
出版商: American Vacuum Society
关键词: GALLIUM ARSENIDES;THIN FILMS;MOLECULAR BEAM EPITAXY;DOPED MATERIALS;LOW TEMPERATURE;ELECTRON MOBILITY;PHOTOLUMINESCENCE;MEV RANGE 01−10;GaAs:C
数据来源: AIP
摘要:
Two series of high‐quality, unintentionally doped GaAs films were grown to evaluate a solid As cracker source with a graphite crucible. In the first series, material properties comparisons were made between a film grown with the As cracker in the dimer mode, a film from the same cracker source but in the tetramer mode, and lastly, a film from a conventional As cell. The film grown with the dimers had an‐type unintentional background doping level of 5×1014cm−3and a 104 000 cm2/V s mobility at 77 K. The films grown with As tetramers gave lowp‐type unintentional background doping levels of less than 1.1×1014cm−3, respectively. Photoluminescence spectra taken of these films at 4 K showed various excitonic transitions and comparableCincorporation. In the second series, films grown at As2/Ga incorporation rate ratios of 1.1, 1.5, and 2.0 had layers that werep‐type, resistive, andntype, respectively. Samples taken from the film grown at the 2.0 ratio had 77 K mobilities as high as 195 000 cm2/V s, with a corresponding net carrier concentration of 3.8×1014cm−3. These mobility values are the highest reported for GaAs grown with a solid As dimer source. Results from a variable temperature van der Pauw measurements of another sample cut from this film gave a donor ionization energy of 2.6 meV.
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