Control of a multidegree of freedom standing wave ultrasonic motor driven precise positioning system
作者:
Antoine Ferreira,
Patrice Minotti,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 4
页码: 1779-1786
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1147966
出版商: AIP
数据来源: AIP
摘要:
A newly developed positioning system incorporating a multidegree of freedom standing wave ultrasonic motor (SWUM) is presented and its advantageous features, operating principles, and some experimental results are described. The principle of motorization is based on the conversion, through frictional contact, of a stationary bending vibration sustained in a slotted metallic resonator, into rigid body displacements. A small autonomous multidegree of freedom nanopositioner using a SWUM motor is presented for fine positioning in scanning tunneling microscopy. The positioning system is achieved via the simultaneous operation of two identical pulse width modulation servo-control systems, each having a laser vibrometer position feedback loop. The closed loop position schemes are theoretically considered and their results are demonstrated and evaluated in practice. Evaluations of experimental tests indicate that a positioning resolution less than 100 nm are successfully achieved for an unlimitedX−Ytravel range with linear speeds between1 mm s−1and fewcm s−1.©1997 American Institute of Physics.
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