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Hollow‐cathode magnetron ion source

 

作者: V. Miljevic´,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1984)
卷期: Volume 55, issue 1  

页码: 121-123

 

ISSN:0034-6748

 

年代: 1984

 

DOI:10.1063/1.1137585

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new type of ion source with axial extraction, based on hollow‐cathode magnetron discharge, has been developed. Constant hydrogen ion currents in excess of 1 mA with an exit source aperture of 1 mm in diameter and accelerating voltages up to 3 kV, have been extracted axially from the cylindrical hollow cathode. Similar results have been obtained with helium, argon, and nitrogen plasmas.

 

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