AbstractThe electron energy distribution function in CF4gas discharge was numerically calculated for density reduced electric fieldE/N= 15 ‐ 300 × 10−17Vcm2using the Boltzmann kinetic equation. The momentum transfer and vibrational cross‐sections were derived from available experimental swarm parameters while the cross‐sections for inelastic electron‐molecule collisional processes included were taken from the literature. The two‐term spherical harmonic expansion of the distribution function was used in the