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Thin film position sensitive detector based on amorphous siliconp–i–ndiode

 

作者: Elvira Fortunato,   Guilherme Lavareda,   Manuela Vieira,   Rodrigo Martins,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 12  

页码: 3784-3786

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144507

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The application of hydrogenated amorphous silicon (a–Si:H) to optoelectronic devices are now well established as a viable low cost technology and is presently receiving much interest. Taking advantage of the properties of a–Si:H based devices, single and dual axis large area (up to 80×80 mm2) thin film position sensitive detectors (TFPSD) based on a–Si:Hp–i–ndiodes have been developed, produced by plasma enhanced chemical vapor deposition. In this study, the main optoelectronic properties presented by the TFPSD as well as their behavior under operation conditions, concerning its linearity and signal to noise ratio, are reported. ©1994 American Institute of Physics.  

 

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