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Ultraviolet‐light‐induced deposition of gold films

 

作者: Yutang Ye,   Robert G. Hunsperger,  

 

期刊: Applied Physics Letters  （AIP Available online 1987）
卷期: Volume 51, issue 25  

页码: 2136-2138

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.98971

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Gold film has been deposited by ultaviolet‐light‐induced photolysis of ammonium tetrachloroaurate/nitrocellulose film. The minimum feature size achieve is about 1 &mgr;m, and the film exhibits good adhesion. The effect of temperature on the photolyzing rate has been examined.

 

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