Titanium oxide thin films have been deposited by thermal evaporation in vacuum and then have been analyzed before and after a suitable thermal annealing in order to test their application inNH3gas-sensing technology. In particular, spectrophotometric and conductivity measurements have been performed in order to determine the optical and electrical properties of titanium oxide thin films. The structure and the morphology of such material have been investigated by high resolution electron microscopy and small area electron diffraction. ©1997 American Institute of Physics.