Amorphous silicon, germanium, and silicon‐germanium alloy thin‐film transistor performance and evaluation
作者:
Philip Yan,
Norman N. Lichtin,
Don L. Morel,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 19
页码: 1367-1369
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97858
出版商: AIP
数据来源: AIP
摘要:
The first hydrogenated amorphous germanium and hydrogenated amorphous silicon‐germanium alloy field‐effect transistors with appreciable field‐effect response inn‐ andp‐channel modes were developed by reducing the dihydride content in the films. Field‐effect mobilities were derived from transistor characteristics. Hole mobilities are superior to those in pure hydrogenated amorphous silicon which offers the opportunity for improved thin‐film devices.
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