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Amorphous silicon, germanium, and silicon‐germanium alloy thin‐film transistor performance and evaluation

 

作者: Philip Yan,   Norman N. Lichtin,   Don L. Morel,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 50, issue 19  

页码: 1367-1369

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97858

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The first hydrogenated amorphous germanium and hydrogenated amorphous silicon‐germanium alloy field‐effect transistors with appreciable field‐effect response inn‐ andp‐channel modes were developed by reducing the dihydride content in the films. Field‐effect mobilities were derived from transistor characteristics. Hole mobilities are superior to those in pure hydrogenated amorphous silicon which offers the opportunity for improved thin‐film devices.

 

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