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Stability of boron‐ and gallium‐induced surface structures on Si(111) during deposition and epitaxial growth of silicon

 

作者: R. L. Headrick,   L. C. Feldman,   I. K. Robinson,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 5  

页码: 442-444

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101869

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have undertaken a new set of experiments to investigate the behavior of adsorbed‐impurity induced reconstructions at growth interfaces. We have observed a striking difference in the stability of the B(3)1/2×(3)1/2and Ga(3)1/2×(3)1/2two‐dimensional structures at the interface between Si(111) anda‐Si, and in their segregation behavior during molecular beam epitaxy crystal growth. This leads to a new model of dopant behavior in silicon molecular beam epitaxy.

 

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