Stability of boron‐ and gallium‐induced surface structures on Si(111) during deposition and epitaxial growth of silicon
作者:
R. L. Headrick,
L. C. Feldman,
I. K. Robinson,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 5
页码: 442-444
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.101869
出版商: AIP
数据来源: AIP
摘要:
We have undertaken a new set of experiments to investigate the behavior of adsorbed‐impurity induced reconstructions at growth interfaces. We have observed a striking difference in the stability of the B(3)1/2×(3)1/2and Ga(3)1/2×(3)1/2two‐dimensional structures at the interface between Si(111) anda‐Si, and in their segregation behavior during molecular beam epitaxy crystal growth. This leads to a new model of dopant behavior in silicon molecular beam epitaxy.
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