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Sputtering Yields for Low Energy He+‐, Kr+‐, and Xe+‐Ion Bombardment

 

作者: D. Rosenberg,   G. K. Wehner,  

 

期刊: Journal of Applied Physics  （AIP Available online 1962）
卷期: Volume 33, issue 5  

页码: 1842-1845

 

ISSN:0021-8979

 

年代: 1962

 

DOI:10.1063/1.1728843

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Sputtering yields of various metals have been determined for He+‐, Kr+‐, and Xe+‐ion bombardment in the energy range 100 to 600 ev. Yields at 400 ev show a periodic dependence on atomic number similar to that of the reciprocals of the heats of sublimation.

 

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