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Investigation of the expanding plasma of an anodic vacuum arc

 

作者: H.‐M. Katsch,   M. Mausbach,   K. G. Mu¨ller,  

 

期刊: Journal of Applied Physics  (AIP Available online 1990)
卷期: Volume 67, issue 8  

页码: 3625-3629

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.345315

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An aluminum plasma is produced by an anodic vacuum arc (25 A, 17 V) with a consumable anode. The plasma expands from the anode to the walls and is investigated by Langmuir probes, a quadrupole mass spectrometer, a retarding field ion energy analyzer, and a quartz‐crystal oscillator for mass flow detection. The electron density ranges within 2×1015–3×1017m−3and the electron temperature within 0.4–0.9 eV. At a target, ion fluxes of 1.5×1019–8×1020m−2 s−1and total particle fluxes of 3×1020–4×1021m−2 s−1are measured. The ions are accelerated in the expanding plasma towards the target and gain a few eV. By a simple collisionless transport model of the expanding plasma, the plasma potential and floating potential are calculated and compared with experimental data.

 

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