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Thin Film Thickness Measurement Using Silver‐Modified Newton's Rings

 

作者: Barry J. Stern,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1963)
卷期: Volume 34, issue 2  

页码: 152-155

 

ISSN:0034-6748

 

年代: 1963

 

DOI:10.1063/1.1718291

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Many interference techniques have been employed for the thickness measurement of thin films. An interference technique which is inexpensive and easy to operate consists of a silvered lens placed over a stepped film with silver overlay. The resultant interference pattern when viewed in reflection is a series of sharp dark rings against a bright background, modified Newton's rings. The step in the film to be measured causes a shift in the rings from which the thickness is calculated. Step heights in silver films, vacuum deposited on fire‐polished microscope slides, of 160 and 780 Å were measured.

 

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