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Infrared photothermal radiometric deep-level transient spectroscopy of shallowB+dopant states inp-Si

 

作者: A. Salnick,   A. Mandelis,   C. Jean,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 18  

页码: 2671-2673

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.120174

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Infrared photothermal radiometric deep-level transient spectroscopy (PTR-DLTS) has been applied to noncontact diagnostics of ap-Si wafer. Both negative and positive peaks in the PTR-DLTS signal temperature scans have been detected. A behavior consistent with photoinjected carrier lifetime enhancement due to the thermal filling ofB+dopant levels in the band gap has been observed. The activation energies of 43 meV (negative peaks) and 60 meV (positive peaks) have been extracted from the corresponding Arrhenius plots. ©1997 American Institute of Physics. 

 

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