Infrared photothermal radiometric deep-level transient spectroscopy of shallowB+dopant states inp-Si
作者:
A. Salnick,
A. Mandelis,
C. Jean,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 18
页码: 2671-2673
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.120174
出版商: AIP
数据来源: AIP
摘要:
Infrared photothermal radiometric deep-level transient spectroscopy (PTR-DLTS) has been applied to noncontact diagnostics of ap-Si wafer. Both negative and positive peaks in the PTR-DLTS signal temperature scans have been detected. A behavior consistent with photoinjected carrier lifetime enhancement due to the thermal filling ofB+dopant levels in the band gap has been observed. The activation energies of 43 meV (negative peaks) and 60 meV (positive peaks) have been extracted from the corresponding Arrhenius plots. ©1997 American Institute of Physics.
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