Real time measurement of current and voltage in discharge pumped KrF*excimer lasers
作者:
E. D. Onkels,
W. Seelig,
期刊:
Review of Scientific Instruments
(AIP Available online 1997)
卷期:
Volume 68,
issue 8
页码: 3250-3251
ISSN:0034-6748
年代: 1997
DOI:10.1063/1.1148282
出版商: AIP
数据来源: AIP
摘要:
An advanced measurement method for the dynamic current voltage characteristics of fast transversely excited atmosphere excimer laser discharges is presented. In contrast to well-known numerical techniques, inductive components are eliminated from the measured discharge gap voltage directly during operation of the laser by means of a fast video amplifier circuit. Comparison of experimental data obtained from a laboratory KrF*excimer laser with theoretical data shows that the achieved resolution is sufficiently high to reveal actual halogen donor concentration and arcing in the discharge. ©1997 American Institute of Physics.
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