A generalized overlap-damage model of amorphous phase and point defect generation during ion implantation into silicon
作者:
U. Bartuch,
W. Karthe,
期刊:
Radiation Effects
(Taylor Available online 1982)
卷期:
Volume 67,
issue 6
页码: 187-192
ISSN:0033-7579
年代: 1982
DOI:10.1080/01422448208228834
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A generalized model is presented for describing point defect and amorphous phase generation kinetics during ion implantation into silicon. The model considers the heterogeneity of the damage clusters by dividing them into three different areas: into an amorphous core (a-Si), an inner periphery of high point defect concentration (undetectable by BPR), and an outer periphery of low point defect concentration (detectable by EPR). Weil-known experimental BPR results may be interpreted by this model.
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