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A generalized overlap-damage model of amorphous phase and point defect generation during ion implantation into silicon

 

作者: U. Bartuch,   W. Karthe,  

 

期刊: Radiation Effects  (Taylor Available online 1982)
卷期: Volume 67, issue 6  

页码: 187-192

 

ISSN:0033-7579

 

年代: 1982

 

DOI:10.1080/01422448208228834

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A generalized model is presented for describing point defect and amorphous phase generation kinetics during ion implantation into silicon. The model considers the heterogeneity of the damage clusters by dividing them into three different areas: into an amorphous core (a-Si), an inner periphery of high point defect concentration (undetectable by BPR), and an outer periphery of low point defect concentration (detectable by EPR). Weil-known experimental BPR results may be interpreted by this model.

 

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