Cl2/Ar plasma etching of binary, ternary, and quaternary In‐based compound semiconductors
作者:
J. W. Lee,
J. Hong,
C. R. Abernathy,
E. S. Lambers,
S. J. Pearton,
W. S. Hobson,
F. Ren,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 4
页码: 2567-2573
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588769
出版商: American Vacuum Society
关键词: INDIUM COMPOUNDS;GALLIUM COMPOUNDS;ALUMINIUM COMPOUNDS;ARSENIDES;PHOSPHIDES;ETCHING;CHLORINE;ARGON;AMBIENT TEMPERATURE;PRESSURE DEPENDENCE;MEDIUM VACUUM;POWER;InP;InAs;(In,Ga)As;(Al,Ga)As;(Al,In)As;(In,Ga)(As,P)
数据来源: AIP
摘要:
A simple Cl2/Ar plasma chemistry can provide smooth, high‐rate etching of InP, InAs, InGaAs, A1InAs, and InGaAsP at room temperature under conditions in which there is a balance between formation and sputter desorption of the normally involatile InCl3. When the neutral/ion ratio is either too high or too low, surface roughening is apparent due either to the presence of InCl3, or to preferential loss of the group V element. The etching has been investigated as a function of microwave power (600–1000 W), rf power (0–300 W), process pressure (1.5–10 mTorr), and Cl2:Ar ratio under electron cyclotron resonance conditions. Use of N2or H2, rather than Ar, as gas additives to the chlorine, did not produce smooth, stoichiometric etched surfaces.
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