Efficient microtip fabrication with carbon coating and electron beam deposition for atomic force microscopy

 

作者: Mariko Yamaki,   Tetsuya Miwa,   Hideyuki Yoshimura,   Kuniaki Nagayama,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1992）
卷期: Volume 10, issue 6  

页码: 2447-2450

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586038

 

出版商: American Vacuum Society

 

关键词: ATOMIC FORCE MICROSCOPY;SURFACE COATING;CARBON;POINT CONTACTS;FABRICATION;ELECTRON BEAMS;DEPOSITION

 

数据来源: AIP

 

 

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