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Spatial variations of radio frequency plasma density caused by a step‐change of secondary electron emission coefficient

 

作者: Weilu Xu,   Paul J. Sides,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 9  

页码: 4293-4301

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.359452

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A two‐dimensional analytical model for the effect of a nonuniform secondary electron emission coefficient (&ggr;) on the powered electrode of a radio frequency plasma was developed. The nonuniformity was a step change in the value of &ggr;. The ambipolar diffusion equation, including ionization by thermal and secondary electrons, took the form of a Helmholtz equation for which the solution by separation of variables was a series of cosine functions. The discontinuity of &ggr; on the electrode engendered substantial nonuniformity of plasma density. For example, the nonuniformity at the sheath edge of an Ar plasma (50 mTorr, 200 V) was 40% for a substrate having a &ggr; of 0.027 and resting on a platen having a &ggr; of 1.00. ©1995 American Institute of Physics.

 

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