Spatial variations of radio frequency plasma density caused by a step‐change of secondary electron emission coefficient
作者:
Weilu Xu,
Paul J. Sides,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 9
页码: 4293-4301
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.359452
出版商: AIP
数据来源: AIP
摘要:
A two‐dimensional analytical model for the effect of a nonuniform secondary electron emission coefficient (&ggr;) on the powered electrode of a radio frequency plasma was developed. The nonuniformity was a step change in the value of &ggr;. The ambipolar diffusion equation, including ionization by thermal and secondary electrons, took the form of a Helmholtz equation for which the solution by separation of variables was a series of cosine functions. The discontinuity of &ggr; on the electrode engendered substantial nonuniformity of plasma density. For example, the nonuniformity at the sheath edge of an Ar plasma (50 mTorr, 200 V) was 40% for a substrate having a &ggr; of 0.027 and resting on a platen having a &ggr; of 1.00. ©1995 American Institute of Physics.
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