Nanometer‐thick hydrocarbon films were plasma polymerized in a rf pulse discharge in an acetylene/argon mixture and were mechanically patterned by the AFM (atomic force microscope). In addition a dc bias voltage was applied to the gold coated Si3N4AFM tip. Depending on the experimental conditions, different patterns have been observed: mechanical indentation, electric charge, and material deposition. The viscous properties of the plasma deposited film affects the movement of the AFM tip while it is scanning the surface in a contact mode, and also affects the size and shape of the patterned area. Spikes of about 25–72 nm height and 60–200 nm width were formed from gold transferred from the newly mounted gold coated tips. The mechanism of gold deposition could be assigned to the Joule heating of the tip, resulting from the electric breakdown of underlying dielectric layers. ©1995 American Institute of Physics.