Pulsed ion implantation of nitrogen in pure titanium
作者:
J.N. Feugeas,
G. Sanchez,
C.O. De Gonzalez,
J.D. Hermida,
G. Scordia,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1994)
卷期:
Volume 128,
issue 4
页码: 267-275
ISSN:1042-0150
年代: 1994
DOI:10.1080/10420159408221048
出版商: Taylor & Francis Group
关键词: ion implantation;surface modification of solids;titanium;titanium nitride;XPS analyses;pulsed ion beams
数据来源: Taylor
摘要:
High current, short length ion beam pulses appear to be a new alternative for surface property modification of solids, due to the combined effect of ion implantation with induced fast heating-cooling which this process presents. The repetitive pulsed nitrogen implantation (with a low energy plasma focus) of pure titanium with different pulse lengths (300 and 400 ns), and fluences per pulse ranging between 1.4 × 1014and 1 × 1015cm−2, with total accumulated fluences between 7 × 1014and 1.6 × 1016showed a surface heating effect with important compositional and physical changes in the layers close to the surface.
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