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Extraction of Positive Ions from Electrodeless Discharge

 

作者: J. F. Williams,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1966)
卷期: Volume 37, issue 9  

页码: 1205-1210

 

ISSN:0034-6748

 

年代: 1966

 

DOI:10.1063/1.1720458

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The positive ion current extracted from an electrodeless discharge is studied as a function of the discharge parameters of oscillator input power and frequency, gas pressure, magnetic field, extraction voltage, and extraction electrode geometry. A greatly enhanced ion current is obtained by operating the discharge at a pressure of several microns of mercury and applying a static magnetic field either parallel or perpendicular to the magnetic component of the high frequency electromagnetic field. Mean beam energies up to 200 eV above the extraction voltage and beam energy spreads of 50 eV are observed and studied as functions of the discharge parameters.

 

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