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Measuring Roundness in the Millimicron Range

 

作者: Jaan Jurisson,   Robert J. Matthys,   Frank Plasek,   Howard J. Thompson,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1967)
卷期: Volume 38, issue 2  

页码: 243-247

 

ISSN:0034-6748

 

年代: 1967

 

DOI:10.1063/1.1771365

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This paper describes an instrument capable of measuring the roundness of an object with a resolution of 5 m&mgr;. The instrument consists of a precision spindle with hydrostatic fluid bearings and a capacitance displacement transducer. In this scheme, the displacement transducer is part of a capacitance bridge, which is made self balancing by closing the servo loop to the nulling capacitor through the recorder pen motor. Also, an instrument using a multiple beam interferometer for the displacement transducer calibration is briefly described.

 

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