Measuring Roundness in the Millimicron Range
作者:
Jaan Jurisson,
Robert J. Matthys,
Frank Plasek,
Howard J. Thompson,
期刊:
Review of Scientific Instruments
(AIP Available online 1967)
卷期:
Volume 38,
issue 2
页码: 243-247
ISSN:0034-6748
年代: 1967
DOI:10.1063/1.1771365
出版商: AIP
数据来源: AIP
摘要:
This paper describes an instrument capable of measuring the roundness of an object with a resolution of 5 m&mgr;. The instrument consists of a precision spindle with hydrostatic fluid bearings and a capacitance displacement transducer. In this scheme, the displacement transducer is part of a capacitance bridge, which is made self balancing by closing the servo loop to the nulling capacitor through the recorder pen motor. Also, an instrument using a multiple beam interferometer for the displacement transducer calibration is briefly described.
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