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Lateral electron current operation of vertical cavity surface emitting lasers with buried tunnel contact hole sources

 

作者: J. J. Wierer,   P. W. Evans,   N. Holonyak,   D. A. Kellogg,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 24  

页码: 3468-3470

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.120400

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Vertical cavity surface emitting lasers (VCSELs) are demonstrated with reverse-biased tunnel contact junctions allowing low-loss lateral electron current to support hole injection. A compact hybrid vertical cavity is employed consisting of a lower 6.5 periodAlxOy/GaAsdistributed Bragg reflector (DBR) formed by selective oxidation of high Al compositionAlxGa1−xAs,and an electron-beam deposited 5 periodSiO2/Siupper DBR. The cavity (active region) is defined also by selectively oxidizing a current-confining aperture. Lateral electron current drives a tunnel contact junction providing hole injection underneath the upper DBR through the oxide-defined current aperture. Thep-type crystal in the VCSEL is reduced to a minimum, thus reducing resistive loss and device voltage. ©1997 American Institute of Physics.

 

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