Epitaxial films of TiC and VC can be deposited at low temperatures on Mg(001) substrates by coevaporation of the metals withC60in a ultrahigh vacuum system. This process was used to deposit TiC/VC (001) superlattices on MgO(001) at 400 °C. The superlattice structure was characterized with low electron energy diffraction, x-ray diffraction, and transmission electron microscopy (TEM). Cross-sectional high-resolution TEM showed good registry between the different carbide layers. ©1998 American Institute of Physics.