Micro‐fabricated piezoelectric cantilever for atomic force microscopy
作者:
Shunji Watanabe,
Toru Fujii,
期刊:
Review of Scientific Instruments
(AIP Available online 1996)
卷期:
Volume 67,
issue 11
页码: 3898-3903
ISSN:0034-6748
年代: 1996
DOI:10.1063/1.1147290
出版商: AIP
数据来源: AIP
摘要:
We successfully developed an atomic force microscope (AFM) with a batch‐fabricated silicon cantilever with a pyramidal stylus. The high quality lead zirconate titanate (PZT) piezoelectric thin film allows simultaneously displacement sensing and actuating. The PZT thin film with a dielectric constant of 1000, a remanent polarization of 30 &mgr;C/cm2, and a piezoelectric constant of −100 pC/N, which are as high as those of bulk ceramics PZT, has been formed by sputtering at 400 °C and subsequent annealing at 650 °C. A Si(111) mono‐atomic step whose height is 4 A˚ has been observed clearly in an AFM cyclic contact mode by a PZT‐AFM lever as a displacement sensor. A PZT‐AFM lever has been used as an actuator forzfeedback positioning for AFM imaging of a compact disk pit. ©1996 American Institute of Physics.
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