High‐current ion implanter using a microwave ion source
作者:
Noriyuki Sakudo,
Katsumi Tokiguchi,
Hidemi Koike,
Ichiro Kanomata,
期刊:
Review of Scientific Instruments
(AIP Available online 1983)
卷期:
Volume 54,
issue 6
页码: 681-684
ISSN:0034-6748
年代: 1983
DOI:10.1063/1.1137453
出版商: AIP
数据来源: AIP
摘要:
A new ion implanter has been designed for high‐dose predeposition in a semiconductor production line. It incorporates a microwave ion source, a 90° magnetic mass separator, and a rotating disk target chamber. Mass peak variations of PH3gas are shown as a function of the incident microwave power. The ion energy level can be varied from 10 to 50 keV. It makes 10 mA P+implantation (maximum 15 mA) possible. After beam adjustment, implantation is automatically carried out with a microcomputer. The operation rate of the implanter is remarkably improved due to the long lifetime of the modified microwave ion source and the low gas consumption. The dose nonuniformity of a 3‐in. wafer implanted with this implanter has a standard deviation (&sgr;) of 0.5%. This small nonuniformity results in a small &sgr; in the transistor current gain (less than 3.5%).
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