Glass and polymer based dosing system for the introduction of reactive gases into ultrahigh vacuum

 

作者: Elizabeth Apen,   Roy Wentz,   Fred Pompei,   John L. Gland,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2946-2947

 

ISSN:0734-2101

 

年代: 1994

 

DOI:10.1116/1.578919

 

出版商: American Vacuum Society

 

关键词: VACUUM SYSTEMS;ULTRAHIGH VACUUM;FLOW REGULATORS;GLASS;POLYMERS;REACTIVITY;DESIGN;GAS FLOW;glass

 

数据来源: AIP

 

摘要:

 

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