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Measurement of the electron density and the attachment rate coefficient in silane/helium discharges

 

作者: C. B. Fleddermann,   J. H. Beberman,   J. T. Verdeyen,  

 

期刊: Journal of Applied Physics  (AIP Available online 1985)
卷期: Volume 58, issue 3  

页码: 1344-1348

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.336105

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Measurements of the electron density in dc and pulsed silane/helium discharges show that the addition of silane to the gas mixture causes a large reduction in the electron density. By monitoring the electron decay time in the afterglow, it is found that the dominant electron loss mechanism in silane/helium is not ambipolar diffusion to the walls, but instead is a volumetric loss process, most likely dissociative attachment of electrons to a product of the silane dissociation. A lower bound for the rate coefficient for this loss process has been determined to be 2.65×10−10cm3/sec.

 

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