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Secondary ion emission studies of the range profiles of implanted ions

 

作者: J.S. Colligon,   D. Fuller,  

 

期刊: Radiation Effects  （Taylor Available online 1976）
卷期: Volume 28, issue 3-4  

页码: 183-187

 

ISSN:0033-7579

 

年代: 1976

 

DOI:10.1080/00337577608237437

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The apparatus described provides a universal technique for determining the range profiles of any ion species which has been implanted in a target.

 

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