Fabrication of a gated gallium arsenide heterostructure resonant tunneling diode
作者:
W. B. Kinard,
M. H. Weichold,
W. P. Kirk,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1990)
卷期:
Volume 8,
issue 3
页码: 393-396
ISSN:0734-211X
年代: 1990
DOI:10.1116/1.585032
出版商: American Vacuum Society
关键词: GALLIUM ARSENIDES;HETEROSTRUCTURES;FABRICATION;MOLECULAR BEAM EPITAXY;METALLIZATION;ETCHING;LITHOGRAPHY;TUNNEL DIODES;(Al,Ga)As;GaAs
数据来源: AIP
摘要:
Techniques used to fabricate a gated resonant tunneling diode (GRTD) are presented. Molecular‐beam epitaxy (MBE), image reversal contact photolithography, liftoff metallization, anisotropic reactive ion etching, isotropic liquid etching, and a resulting self‐aligned gate metal deposition technique were used to realize this effort. The physical sizes of the fabricated GRTDs were 2, 4, and 6 μm in diameter. The electrical size of the channel within the vertical resonant tunneling diode, however, was controlled by a simple, self‐aligned rectifying electrode at the well region. Arrays of devices were fabricated to enhance detection while retaining small geometries. The results from these first devices indicate that aninsitutransition from a two‐dimensional resonant tunneling diode (RTD) to a zero‐dimensional quantum dot is feasible using this design. Improvements in the design are realizable from straightforward modifications in the MBE material.
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