Nitrogen doping in hydrogenated amorphous silicon
作者:
Jiang‐Huai Zhou,
Kengou Yamaguchi,
Yoshikazu Yamamoto,
Tatsuo Shimizu,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 8
页码: 5086-5089
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354293
出版商: AIP
数据来源: AIP
摘要:
The doping effect of N in hydrogenated amorphous silicon (a‐Si:H) is studied. The absence of a thickness dependence of the conductivity of N‐doped samples provides convincing evidence that the doping effect of N ina‐Si:H is a bulk property. The similarity between the effect of N doping and that of P doping found in the conductivity and the photoconductivity decay indicates that N can act as an effective donor ina‐Si:H and that N doping is also of substitutional type; however, the solid‐phase doping efficiency of N is estimated to be at least three orders of magnitude lower than that of P.
点击下载:
PDF
(491KB)
返 回