Dual‐frequency N2and NH3plasma modification of polyethylene and polyimide
作者:
J. E. Klemberg‐Sapieha,
O. M. Küttel,
L. Martinu,
M. R. Wertheimer,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 2975-2981
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577158
出版商: American Vacuum Society
关键词: NITROGEN;AMMONIA;POLYIMIDES;POLYETHYLENES;GLOW DISCHARGES;SURFACE STRUCTURE;SURFACE REACTIONS;FILMS;polyethylene;polyimides
数据来源: AIP
摘要:
Surfaces of polyethylene and polyimide films were treated in NH3and N2plasma using ‘‘dual‐frequency’’ excitation: The samples were exposed to a microwave (2.45 GHz) glow discharge, while variable radio frequency (13.56 MHz)—induced negative direct current bias voltage values were simultaneously applied. The surface chemical structure was determined by high‐resolution x‐ray photoelectron spectroscopy. Up to 40 at. % of nitrogen was incorporated onto the sample surface by exposure to a microwave discharge in N2, while systematically lower N uptake was found in NH3plasma. Nitrogen was found to be bonded predominantly in amine (C–N) groups by NH3‐type plasma, and in imine groups (C=N) by N2plasma. Surface ‘‘damage’’ of polyimide, including opening of benzene rings and breaking of carbonyl groups, accompanied by the formation of increasing concentrations of chemically reactive receptor sites, has been demonstrated with increasing the energy of bombarding species.
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