Ceramic films relating to high‐Tc superconductors were grown in a UHV deposition‐analysis system. Against our intuition that large oxygen deficiency is inevitable in the growth of oxide films in UHV, required oxidation state was achieved either by using such a highly oxidative gas as NO2or by choosing thermodynamically stable oxides. Two‐dimensional growth of ceramics were verified in MBE growth of Bi‐Sr‐Cu‐O as well as in laser MBE growth of various ceramic thin films. The growth mode and the oxidation state of the films were investigated byin situRHEED and XPS analyses. Discussion is extended to the possibility of our method for constructing new ceramics layers which may exhibit higher Tc.