High pressure discharges are the basis of small high intensity light sources. In this work, we demonstrate the formation of high pressure discharges, in cavities formed by applying micromachining and integrated circuit techniques to quartz substrates. Cavities containing varying amounts of mercury and argon were fabricated to obtain high pressure discharges. A high pressure mercury discharge was formed in the electrodeless cavities by exciting them with a microwave source, operating at 2.45 GHz and in the electroded cavities by applying a dc voltage. The contraction of the discharge into a high pressure arc was observed. A broad emission spectrum due to self-absorption and collisions between excited atoms and normal atoms, typical of high pressure mercury discharges, was measured. The light output and efficacy increased with increasing pressure. The measured voltage was used to estimate the pressure within the electroded cavities, which is as high as 127 atm for one of the two cavities discussed in this work. Efficacies over 40 lumens per watt were obtained for the electrodeless cavities and over 50lm/W for the electroded cavities. ©1997 American Institute of Physics.