This article reports the development of a two-dimensional analyzer, which enables us to observe the distribution of hydrogen on surfaces. A micro-focused electron beam with low primary electron energy (<1 keV) is scanned over a sample surface, in conjunction with a time-of-flight type electron-stimulated desorption spectroscope, to obtain clear H+ion images of a specimen surface. A line scan analysis of H+ions on an integrated circuit and a scanning electron-stimulated desorption image of H+ions on a Cu mesh are presented as demonstrations. ©1997 American Institute of Physics.