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Charge‐state‐dependent iron precipitation in silicon

 

作者: A. Mesli,   T. Heiser,   N. Amroun,   P. Siffert,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 18  

页码: 1898-1900

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.104005

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The kinetics of interstitial iron precipitation inp‐type silicon are investigated. During annealing, the iron charge state is controlled by the applied reverse voltage and its effect on the precipitation is studied. We observe that iron in the neutral charge state (Fe0i) precipitates preferentially in three‐dimensional nucleation centers while Fe+ivanishes in the dislocation lines (rod‐like nucleation centers). These centers are created during the fast cooling procedure necessary to dissolve iron in the silicon matrix.

 

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