Summary Abstract: Theoretical studies of alloy clustering and interface roughness in InAs, GaAs, and AlAs based heterostructures grown by molecular beam epitaxy

 

作者: Jasprit Singh,   B. Davies,   S. Dudley,   K. K. Bajaj,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1986）
卷期: Volume 4, issue 2  

页码: 558-559

 

ISSN:0734-211X

 

年代: 1986

 

DOI:10.1116/1.583431

 

出版商: American Vacuum Society

 

关键词: InAs;GaAs;AlAs

 

数据来源: AIP

 

 

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