A wide‐g range silicon piezoresistive accelerometer
作者:
Yu‐Wen Hsu,
Shey‐Shi Lu,
Lung‐Jieh Yang,
Pei‐Zen Chang,
期刊:
Journal of the Chinese Institute of Engineers
(Taylor Available online 1995)
卷期:
Volume 18,
issue 6
页码: 873-878
ISSN:0253-3839
年代: 1995
DOI:10.1080/02533839.1995.9677755
出版商: Taylor & Francis Group
关键词: piezoresistivity;accelerometer
数据来源: Taylor
摘要:
In this paper, a high‐performance silicon piezoresistive accelerometer, fabricated by bulk micromachining with an almost linear I/O (acceleration / voltage) relationship from 0 to 90g over a 400Hz bandwidth suitable for vehicle's safety system, is described. This accelerometer is composed of two glass cover caps and a Si sensing structure. The size of the sensing structure is 3.3mm × 2.05 mm × 0.15 mm. It consisted of a “mass”, a “frame”, and 4 thin beam “bridges”. The sensitivity of the accelerometer was found to be 9.6 × 10‐8(sec2/m) and a gauge factor of 18 was deduced from this value.
点击下载:
PDF (378KB)
返 回